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发明名称
Operation confirming method and device for industrial machinery
摘要
申请公布号
KR100622540(B1)
申请公布日期
2006.09.11
申请号
KR20027005069
申请日期
2002.04.19
申请人
发明人
分类号
B23Q15/00;H01L21/768
主分类号
B23Q15/00
代理机构
代理人
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