发明名称 |
PHOTOMASK AND METHOD FOR MANUFACTURING DISPLAY PANEL |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a display panel having a small contact hole. <P>SOLUTION: The method for manufacturing a display panel includes a contact hole forming step of forming a contact hole in at least one layer in layers formed on the surface of a substrate. The contact hole forming step includes steps of applying a resist film on the surface of one layer, exposing the resist film through a photomask and developing to form a first opening in the resist film corresponding to the contact hole. The exposure step is carried out by using a photomask 2 having a main pattern 41 corresponding to the contact hole with addition of a first auxiliary pattern 42. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
申请公布号 |
JP2006235515(A) |
申请公布日期 |
2006.09.07 |
申请号 |
JP20050053767 |
申请日期 |
2005.02.28 |
申请人 |
SHARP CORP |
发明人 |
SAITO KAORI;KITO TSUNANORI |
分类号 |
G03F1/36;G03F1/68;G03F7/20 |
主分类号 |
G03F1/36 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|