发明名称 PHOTOMASK AND METHOD FOR MANUFACTURING DISPLAY PANEL
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a display panel having a small contact hole. <P>SOLUTION: The method for manufacturing a display panel includes a contact hole forming step of forming a contact hole in at least one layer in layers formed on the surface of a substrate. The contact hole forming step includes steps of applying a resist film on the surface of one layer, exposing the resist film through a photomask and developing to form a first opening in the resist film corresponding to the contact hole. The exposure step is carried out by using a photomask 2 having a main pattern 41 corresponding to the contact hole with addition of a first auxiliary pattern 42. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006235515(A) 申请公布日期 2006.09.07
申请号 JP20050053767 申请日期 2005.02.28
申请人 SHARP CORP 发明人 SAITO KAORI;KITO TSUNANORI
分类号 G03F1/36;G03F1/68;G03F7/20 主分类号 G03F1/36
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