MOVEMENT DEVICE AND CHIP MOUNTER USING THE MOVEMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a movement device capable of increasing the acceleration of a movement and providing movements with multiple degrees of freedom and a chip mounter using the movement device. SOLUTION: This movement device 1 comprises a first main movement part 7 driven by a first actuator to perform the movement with the first degree of freedom and a second main movement part 7 driven by a second actuator to perform the movement with the second degree of freedom. The movement device 1 comprises a single driven part 9 driven by the driving force of the first and second main movement parts 7, a restriction means restricting the movement generated in the driven part 9 by the driven to the motion with the second degree of freedom allowed to perform by the movements of the first and second main movement parts 7, and two engagement parts engaging the first and second main movement parts 7 with the driven part 9 while allowing the movement of the second degree of freedom restricted by the restriction means. COPYRIGHT: (C)2006,JPO&NCIPI