| 摘要 |
PROBLEM TO BE SOLVED: To provide a coater for applying a coating solution that is transparent in some cases to a cylindrical member and measuring an amount of the solution to be applied. SOLUTION: The coater comprises a coating nozzle 12 for coating the circumference portion of a cylindrical member 10 with a coating solution in a linear form, a dispenser 15 for controlling an amount of the coating solution discharged from the coating nozzle 12 to coat the cylindrical member, a chuck portion 11 for holding and rotating the cylindrical member 10 at a predetermined speed for positioning, a camera 20 for focussing a position to be coated on the circumference of the cylindrical member 10 which is coated with the coating solution from the coating nozzle 12 to be arranged so that an optical direction of the camera 20 coincides with a tangential direction on the circumference in the direction of rotating the cylindrical member 10 to the position to be coated, and an illumination means 21 which is arranged to face the camera 20 relative to the position of the cylindrical member 10 to be coated to illuminate the cylindrical member 10 against an illumination. COPYRIGHT: (C)2006,JPO&NCIPI
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