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发明名称
MOVING SHOWER NOZZLE FOR ETCHING EQUIPMENT AND RINSE BATH EQUIPPED WITH SAME
摘要
申请公布号
KR100623883(B1)
申请公布日期
2006.09.07
申请号
KR20050067809
申请日期
2005.07.26
申请人
SYSTEMS TECHNOLOGY INCORPORATED
发明人
YEAN, CHANG HEUM;KWAK, SUN PYO;PARK, KYOUNG SIK
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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