| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for evaluating simply the contamination state of a space in a substrate conveyance container. SOLUTION: This evaluation method of the contamination state of the space in the substrate conveyance container having a container body and a lid body, wherein an opening part is formed on one side of the container body and the lid body is mounted on the container body openably/closably so that the opening part can be blocked is characterized as follows; after mounting a bag body on the substrate conveyance container so that the opening part is blocked from the outside air by the bag body, the blocking state of the opening part by the lid body is removed to thereby communicate the space inside the container body with the bag body inside; while introducing inert gas from a gas introduction hole provided on the bag body into the container body, discharge gas discharged from a gas discharge port provided on the bag body is collected; and a contaminant in the discharge gas is analyzed. COPYRIGHT: (C)2006,JPO&NCIPI |
