| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect the shape of the surface of an object precisely. <P>SOLUTION: A detection device detects the shape of the surface of an object according to the potential of a connection point N between an electrode 51 for detection that opposes the object and forms a capacitor 50 for detection and a reference capacitor having capacitance CR. When the capacitance of the capacitor 50 for detection when the projection of the object opposes the electrode 51 for detection is set to C<SB>XR</SB>and the capacitance of the capacitor 50 for detection when the projection of the object opposes the electrode 51 for detection is set to C<SB>XV</SB>, the capacitance C<SB>R</SB>of the reference capacitor is selected so that C<SB>R</SB>>(C<SB>XR</SB>×C<SB>XV</SB>)<SP>1/2</SP>is met. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
