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发明名称
PROTECTIVE LAYER SYSTEM FOR NON-OXIDIC SUBSTRATES CONTAINING SI
摘要
申请公布号
EP1554230(B1)
申请公布日期
2006.09.06
申请号
EP20030753334
申请日期
2003.09.30
申请人
FORSCHUNGSZENTRUM JUELICH GMBH
发明人
LATZEL, SILKE;VASSEN, ROBERT;STOEVER, DETLEV
分类号
C04B41/87;C04B41/52;C04B41/89;F01D5/28
主分类号
C04B41/87
代理机构
代理人
主权项
地址
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