Capacitor element and method for trimming a capacitor element

摘要

A capacitor element on a chip, e.g., a MMIC chip, includes a main capacitor in parallel with a series configuration of trimming capacitors. The total capacitance value of the parallel arrangement can be increased from its inherently minimum value by applying one or more laser pulses to one or more of the trimming capacitors, such that in each case a short-circuit is produced between the metallization layer to which the pulses are applied and the other metallization layer making up the trimming capacitor.