摘要 |
A hydrogen sensor 1 includes detection elements 4 A, 4 B, 4 C formed from hydrogen-absorbing alloys which exhibit different hydrogen-absorbing pressures at a given temperature; a strain gauge 6 which detects changes in volume upon absorbing of hydrogen by the detection elements 4 A, 4 B, 4 C; a micro-heater 2 which controls the temperatures of all the detection elements 4 A, 4 B, 4 C to approximate equal values; and a substrate 3.
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