硅片几何参数自动扫描平台,申请号CN200530045011.3-传众专利搜索

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发明名称	硅片几何参数自动扫描平台
摘要
申请公布号	CN3556431D	申请公布日期	2006.08.30
申请号	CN200530045011.3	申请日期	2005.10.28
申请人	上海星纳电子科技有限公司	发明人	朱洪伟
分类号	10-05	主分类号	10-05
代理机构	上海专利商标事务所有限公司	代理人	左一平
主权项
地址	201108上海市虹梅南路3609号4号楼二楼

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