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发明名称
DEPOSITION APPERATURE AND METHOD FOR DEPOSITION USING THEREOF
摘要
申请公布号
KR20060094698(A)
申请公布日期
2006.08.30
申请号
KR20050016076
申请日期
2005.02.25
申请人
SAMSUNG SDI CO., LTD.
发明人
KIM, HAN KI;JEONG, SEOK HEON;KIM, MYOUNG SOO;LEE, KYU SUNG
分类号
C23C16/50;C23C16/00
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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