| 摘要 |
<p>A pod cover removing-installing apparatus can open and close any covers for a variety of pods made by a various manufactures, can satisfy an allowable distortion error capable of being normally operated even if conditions such as temperature, humidity, and can remove and install the cover without causing it to collide with any one of the parts of the pods. The pod cover removing-installing apparatus to remove and install a cover 203 for an opening 202 of a pod 200, of which the inside is kept extremely clean, by causing the cover to engage a door 13 for an opening 12 of a high cleanliness room, while maintaining high cleanliness of the pod and the room by closely attaching the circumference of the two openings. The apparatus is provided with positioning pins 14a, 14b for positioning the cover 13, a fine adjustment mechanism 20 for fine adjustment of the positioning pins 14a, 14b, and a holding mechanism 40 for holding the position of the cover 13 engaging the positioning pins 14a, 14b. <IMAGE></p> |
