| 摘要 |
An object is to provide a mask formation method, which can curtail a manufacturing cost. A method of forming a film of predetermined pattern on the front surface of a member to-be-processed is so constructed as to carry out the step (S 178 ) of improving the adherence of a pattern material solution to the member to-be-processed, the step (S 180 ) of filling up a pattern forming recess provided in a mask on the surface of the member to-be-processed with a pattern material solution, the step (S 186 ) of improving the film quality of the pattern film to-be-formed by processing the pattern material solution, the step (S 188 ) of removing the pattern material solution having adhered on the mask, the step (S 190 ) of drying the pattern material solution, and the step (S 196 ) of subjecting the pattern film to annealing processing.
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