| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment apparatus in which a liquid chemical housing vessel is easily replaced. SOLUTION: Each LED 76 of a LED display part 75 is arranged to have the same arrangement form as that of each vessel 71. When a liquid chemical in the vessel 71 is used up, the LED 76 of the correspondent LED display part 75 is lighted. Before the replacement of the vessel 71, an operator reads a bar code 72 of the virgin vessel 71 by a bar code reader 82. A bar code reader collator 83 collates the bar code data of the virgin vessel 71 with the bar code data of the vessel 71 registered in the data base and corresponding to the lighted LED 76. When the bar code reader collator 83 judges that the kind of the liquid chemical in both vessels 71 is the same, the display of the LED 76 is shifted from lighting to blinking. As the result, the arranged position of the vacant vessel 71 to be replaced is easily grasped to effectively prevent misreplacement of the vessel 71. COPYRIGHT: (C)2006,JPO&NCIPI
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