| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent rigidity of a holder main body from getting low, by a simple means, in a holder device having a lift-rotation mechanism for a substrate, and to restrain the holder main body from being deformed and vibrated to hold the substrate in a stable condition. <P>SOLUTION: A locking member 61 is provided to be advanced and retreated by a reciprocating cylinder 64 or the like in a circular-arc-shaped guide opening part 8-1 with a lift pin rotation-moved by ring support members 5, 5. The locking member 61 is advanced in the case other than the moving of the lift pin, an engaging part 61a in a tip is thereby engaged with an engaged block 65 provided in an opposed position, and a locked condition is attained thereby to enhance the rigidity of the holder main body. When the lift pin is moved, the locking member 61 is retreated to form a lock-released condition, so as to move the lift pin. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
