发明名称 Highly sensitive defect detection method
摘要 A highly sensitive defect detection method is disclosed. A medium with a refractive index greater than 1 is formed on a sample. As a result, incident light projected by a defect detecting system attenuates less when reaching the bottom defects. The detection sensitivity of the defect detecting system is enhanced accordingly.
申请公布号 US2006187446(A1) 申请公布日期 2006.08.24
申请号 US20050121902 申请日期 2005.05.05
申请人 CHANG CHUNG-I;LIU FERRIS 发明人 CHANG CHUNG-I;LIU FERRIS
分类号 G01N21/88 主分类号 G01N21/88
代理机构 代理人
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