| 摘要 |
PROBLEM TO BE SOLVED: To improve inspection work by easily installing a calibration board 17 at a correct position in a prober. SOLUTION: This tool 15 for a calibration board is composed by forming its base plate 16 in a shape identical to that of an inspection object and by mounting a calibration board 17 on its surface. That is to say, the tool 15 for a calibration board is a tool for supporting the calibration board 17 for inspecting an electrical characteristic of a probe 11. By forming the tool 15 for a calibration board in the shape identical to that of an inspection object, its installation to the prober is facilitated. The calibration board 17 is embedded in a surface of the tool 15 for a calibration board. The calibration board 17 is provided with a positioning mark 21. The tool 15 for a calibration board can be used for inspection of a semiconductor wafer and a liquid crystal substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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