| 摘要 |
The main object of the invention is to provide a polarized light irradiation apparatus capable of providing a uniform alignment ability for an alignment film without using a highly parallelized light, and capable of conducting a photo-alignment in a larger area efficiently, and having an excellent durability. To this end, there is proposed a polarized light irradiation apparatus comprising: a light source; a projection device for projecting a light from the light source as a projection light including a non-parallel light; a polarizer for passing the projection light therethrough and comprising one glass plate disposed at a tilt by Brewster angle relative to an incident direction of a center part of the projection light, or comprising a plurality of glass plates disposed in parallel with each other at a predetermined interval and at a tilt by Brewster angle relative to the incident direction of the center part of the projection light; and a substrate transportation device for transporting an irradiation target substrate in a direction perpendicular to a straight line including a projection image which is obtained by projecting an incident plane of a light entering at the Brewster angle among the projection light onto the substrate.
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