| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of evalauating a heat treatment boat capable of adequately determining an advisability of the heat treatment boat that holds a semiconductor substrate and introduces it to a heat-treating furnace in a small amount of time, and capable of improving a productivity of the semiconductor substrate that is heat treated. SOLUTION: The method that adequately determines the advisability of the heat treatment boat that holds a semiconductor substrate and introduces it to the heat-treating furnace determines the advisability of the heat-treatment boat depending on the number of a dislocation formed at a contact part for contacting the heat-treatment boat of the semiconductor substrate after holding the semiconductor substrate by the heat-treatment boat and introducing it to the heat-teating furnace. COPYRIGHT: (C)2006,JPO&NCIPI |
