| 摘要 |
The sensor includes a thin ceramic layer (1), with two separated electrodes. The ceramic layer lies between electrode conductors (4,5). Porous Pt is deposited on opposite sides of the membrane, pref. of ZrO2, whose rigidity is improved by the zig-zag arrangement of its cross-section. The tracks are arranged in parallel pairs, sepd. by a distance of e.g. 10 microns, to eliminate the need for a special O2-permeable conductive layer. Heating conductors are applied pref. at right angles to the tracks, from which they are insulated electrically e.g. by SiO2 coating, on supports of e.g. Si about 100 microns apart. |
