| 摘要 |
Method and device for measuring mechanical properties of microscale and nanoscale thin film membranes. A testing system comprises a unitary material load cell, including a substrate, a beam supported to the substrate at its ends and otherwise substantially free from the substrate, a test-probe extending from the substrate and connected to the beam, and a scale to measure movement of the test-probe relative to the substrate. The system further comprises a thin film support, supporting a thin film at its circumference and providing a freestanding thin film, and a positioner to move the unitary material load cell for controlled pushing against the freestanding thin film.
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