ION INJECTING APPARATUS FOR SEMICONDUCTOR DEVICE MANUFACTURING,申请号KR20050013056-传众专利搜索

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发明名称	ION INJECTING APPARATUS FOR SEMICONDUCTOR DEVICE MANUFACTURING
摘要
申请公布号	KR20060092354(A)	申请公布日期	2006.08.23
申请号	KR20050013056	申请日期	2005.02.17
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KIM, JIN HOON
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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