发明名称 |
Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities |
摘要 |
Methods and apparatus for generating strongly-ionized plasmas are disclosed. A strongly-ionized plasma generator according to one embodiment includes a chamber for confining a feed gas. An anode and a cathode assembly are positioned inside the chamber. A pulsed power supply is electrically connected between the anode and the cathode assembly. The pulsed power supply generates a multi-stage voltage pulse that includes a low-power stage with a first peak voltage having a magnitude and a rise time that is sufficient to generate a weakly-ionized plasma from the feed gas. The multi-stage voltage pulse also includes a transient stage with a second peak voltage having a magnitude and a rise time that is sufficient to shift an electron energy distribution in the weakly-ionized plasma to higher energies that increase an ionization rate which results in a rapid increase in electron density and a formation of a strongly-ionized plasma.
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申请公布号 |
US7095179(B2) |
申请公布日期 |
2006.08.22 |
申请号 |
US20040708281 |
申请日期 |
2004.02.22 |
申请人 |
ZOND, INC. |
发明人 |
CHISTYAKOV ROMAN |
分类号 |
H01J7/24;C23C14/00;C23C14/35;C23C16/00;H01J37/34 |
主分类号 |
H01J7/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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