| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing thermal sensing elements less that are affected by piezoelectric effect. SOLUTION: The method for manufacturing thermal sensing elements measures temperatures in a monitoring region, based on the dielectric constant of a dielectric material, and comprises a heating step S101 of heating the dielectric material to the Curie-point temperature of the dielectric material or higher and a cooling step S102 of cooling the dielectric material to a temperature lower than the Curie-point temperature. The dielectric material provides a plurality of domains, having spontaneous polarizations that direct to different directions by applying this method, and piezoelectric effects mutually canceling can suppress changes in the dielectric constant by the piezoelectric effects. COPYRIGHT: (C)2006,JPO&NCIPI
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