| 摘要 |
PROBLEM TO BE SOLVED: To provide an array type contact pressure sensor capable of detecting contact pressure with reduced crosstalk and high density, and capable of providing a deflection detecting element on a face opposite to a contact face contacting with an examined object of a semiconductor substrate. SOLUTION: A plurality of pressure sensitive elements 34 arrayed unidirectionally A in the semiconductor substrate 24 of fixed thickness includes (a) a plurality of beam parts 38 in parallel each other formed between grooves 36 by providing the grooves 36 of prescribed pattern in an inner face 32 of the semiconductor substrate 24, and (b) the plurality of deflection detecting elements 42 provided in the plurality of beam parts 38, and for generating respectively electric signals in response to deflections of the beam parts 38, and (c) outputs respectively the electric signals in response to the contact pressure applied onto a pressing face 44 of the semiconductor substrate 24. The array type contact pressure sensor 26 is provided to detect a contact pressure distribution with the reduced crosstalk and the high density, and to install the deflection detecting element 42 on the inner face 32 in the side opposite to the pressing face 44 of the semiconductor substrate 24. COPYRIGHT: (C)2006,JPO&NCIPI
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