| 摘要 |
PURPOSE:To obtain a liquid jet device of small size, high jet efficiency and steady operation, used for an ink jet recording device head, etc., by using a PZT line piezoelectric thin film for a means to reduce the volume of pressure chambers rapidly. CONSTITUTION:On a substrate 11 of glass, etc., of, for example, about 20mmX 15mm, another substrate 21 is placed and sticked and made to serve also as a vibration board. The part above the pressure chambers 12 of this substrate 21 is made in thickness of about 50-100mum and the size of the pressure chamber 12 is made in diameter of 2mm and in depth of 50mum. On the part above the pressure chambers of the substrate 21, a common electrode 23 is provided, and on the electrode, a PZT (Lead Zirconate titanate) thin film 24 is formed in thickness of 50mum, and on the film, a counter-electrode 25 is formed. By applying voltage selectively to the two electrodes 23 and 25 of this construction, the volume of the pressure chambers 12 is rapidly decreased and liquid is jetted selectively from a nozzle 14 (50mum in width and 50mum in depth). As this device has small pressure chambers, its efficiency is high and it operates steadily. Also, the PZT thin film has an advantage that it can be mass-poduced at a time by spattering, printing, etc. |
