摘要 |
PROBLEM TO BE SOLVED: To provide an on-vehicle GMR angle sensor having superior heat resistance by reducing the output characteristic fluctuations due to utilization environment temperature. SOLUTION: The on-vehicle GMR angle sensor comprises a GMR element for changing element resistance in response to an external magnetic field, a lead conductor connected to both the ends of the GMR element, and a protective layer sealing the GMR element and the lead conductor. The protective layer is formed of a laminated structure of an SiO<SB>2</SB>film for securing insulation of the GMR element and the lead conductor, and an Al<SB>2</SB>O<SB>3</SB>film laminated under the SiO<SB>2</SB>film and covering the GMR element and the lead conductor. COPYRIGHT: (C)2006,JPO&NCIPI
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