| 摘要 |
A hard film contains [(Nb<SUB>1-d</SUB>,Ta<SUB>d</SUB>)<SUB>a</SUB>Al<SUB>1-a</SUB>](C<SUB>1-x</SUB>N<SUB>x</SUB>), [(Nb<SUB>1-d</SUB>,Ta<SUB>d</SUB>)<SUB>a</SUB>,Al<SUB>1-a-b-c</SUB>,Si<SUB>b</SUB>,B<SUB>c]</SUB>(C<SUB>1-x</SUB>N<SUB>x</SUB>), [(Cr,V)<SUB>p</SUB>(Nb,Ta)<SUB>q</SUB>(Al,Si,B)<SUB>r</SUB>](C<SUB>1-x</SUB>N<SUB>x</SUB>), or [(Ti,Cr,V)<SUB>p</SUB>(Nb,Ta)<SUB>q</SUB>(Al,Si,B)<SUB>r</SUB>](C<SUB>1-x</SUB>N<SUB>x</SUB>) in which the atomic ratios satisfy the following conditions: 0.4<=a<=0.6, 0<b+c<=0.15, 0<=d<=1, 0.4<=x<=1, provided that one of "b" and "c" may be zero but both of them are not simultaneously zero, p+q+r=1; p<SUB>Ti</SUB>+p<SUB>Cr</SUB>+p<SUB>V</SUB>=p; q<SUB>Nb</SUB>+q<SUB>Ta</SUB>=q; r<SUB>Al</SUB>+r<SUB>si</SUB>+r<SUB>B</SUB>=r, 0.05<=q, 0.5<=r<=0.73, 0<=R<SUB>si</SUB>+r<SUB>B</SUB><=0.15, and 0.4<=x<=1.0, provided that when P<SUB>Ti </SUB>is greater than zero, the total of p<SUB>Cr</SUB>, p<SUB>V</SUB>, r<SUB>Si</SUB>, and r<SUB>B </SUB>is greater than zero.
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