发明名称 ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method capable of forming resin layers to be thick, without causing deformations, cracks or separations of the resin layers in the manufacturing of electronic devices provided with a plurality of resin layers, and to provide the electronic device. SOLUTION: This for manufacturing the electronic device that is provided with a first insulating resin layer 11 provided on a substrate 1, a wiring layer 12 provided on the first insulating resin layer 11, and a second insulating resin layer provided on the first insulating resin layer 11 and the wiring layer 12. Prior to forming the second insulating resin layer, plasma treatment is applied to the surface of the first insulating resin layer 11. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006216587(A) 申请公布日期 2006.08.17
申请号 JP20050024887 申请日期 2005.02.01
申请人 FUJIKURA LTD 发明人 ABE HIROSHI;ITO TATSUYA
分类号 H01L21/56;H01L23/12 主分类号 H01L21/56
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