| 摘要 |
PROBLEM TO BE SOLVED: To disclose methods of manufacturing microlenses, microlens arrays and image sensors. SOLUTION: Regarding the method of manufacturing the microlens, the method includes a process of forming a 1st lens pattern, a process of forming a 2nd lens pattern on a portion of the 1st lens pattern in a manner which controls an asymmetric curvature of the microlens, and a process of reflowing the 1st and 2nd lens patterns. Regarding the methods of manufacturing the microlens array and a CMOS image sensor, the microlens having the asymmetric curvature is formed so that the curvature asymmetry of the microlens may become larger as it is separated away from the center of the microlens array. Consequently, the curvature of the microlens can be effectively controlled. COPYRIGHT: (C)2006,JPO&NCIPI
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