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发明名称
Cu LINE OF SEMICONDUCTOR DEVICE AND FORMATION METHOD THEREOF
摘要
申请公布号
KR100613375(B1)
申请公布日期
2006.08.17
申请号
KR20040064022
申请日期
2004.08.13
申请人
发明人
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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