PRE-INSULATING SUBSTRATE, METHOD OF MANUFACTURING SUBSTRATE, METHOD OF MANUFACTURING SURFACE ACOUSTIC WAVE VIBRATOR, SURFACE ACOUSTIC WAVE VIBRATOR, SURFACE ACOUSTIC WAVE DEVICE, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a pre-insulating substrate provided with a protective sheet having sufficient adhesive strength to treatment for rendering the substrate insulated, a method of manufacturing a substrate where only a desired range of a base surface is rendered insulated, a method of manufacturing a surface acoustic wave vibrator, the surface acoustic wave vibrator manufactured by the manufacturing method, a surface acoustic wave device, and electronic apparatus. SOLUTION: The method of manufacturing the substrate comprises: a step of giving a first functional liquid to a part of a conductive section of the surface of the base 11 and drying it for forming a first protection layer 31 having a peripheral partition part 33; a step of giving a second functional liquid to an area surrounded by the partition part and drying it for forming a second protection layer 32 to form a protective film 30 having the first protection layer 31 and the second protection layer 32 on the surface of the base 11; a step (b) applying treatment for rendering the substrate insulated to the surfaces of the base 11 and the pre-insulating substrate 12(a) having the protective film 30; and a step of peeling off the protective film 30. COPYRIGHT: (C)2006,JPO&NCIPI