| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and inspection device for improving anomalous current detection accuracy lowered owing to the fluctuating tendency of IDDQ measurement values. SOLUTION: This inspection method comprises: a process for repeatedly performing stationary power source current measurement while sequentially switching inspection patterns to obtain series of stationary power source current measurement data corresponding to the respective inspection patterns; a process for dividing each of the series of stationary power source current measurement data, in a measurement order, into partial series each comprising stationary power source current measurement data less in number than the total of the inspection patterns; and a process for calculating a quality determination index for each partial series by using the measurement data to perform quality determination on each semiconductor integrated circuit which is the inspecting object by comparing the determination index with a quality determination standard value. COPYRIGHT: (C)2006,JPO&NCIPI
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