DEEP ULTRAVIOLET CATADIOPTRIC ANAMORPHIC TELESCOPE,申请号EP20000977227-传众专利搜索

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发明名称	DEEP ULTRAVIOLET CATADIOPTRIC ANAMORPHIC TELESCOPE
摘要
申请公布号	EP1252689(A4)	申请公布日期	2006.08.16
申请号	EP20000977227	申请日期	2000.11.15
申请人	CYMER, INC.	发明人	SMITH, SCOTT, T.
分类号	G02B13/08;G02B13/14;G02B17/08;G02B27/09;G03F7/20;H01S3/00;H01S3/10;H01S3/225;(IPC1-7):H01S3/08	主分类号	G02B13/08
代理机构		代理人
主权项
地址

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