发明名称 |
Manufacturing method for a near-field optical probe |
摘要 |
<p>Realized are a near-field optical probe capable of illuminating or/and detecting near-field light great in intensity and acquiring an optical image great in S/N ratio, and a manufacturing method and near-field optical apparatus. Accordingly, a near-field optical probe comprises a cantilever in a cantilever form, a base for supporting the cantilever, a tip in a weight form formed on the cantilever, a microscopic aperture formed in an end of the tip, and a shade film formed on a surface of the cantilever opposite to the base and on area other than the microscopic aperture of the tip. The tip and the cantilever are formed of a transparent material high in transmissivity relative to a wavelength of light to be generated and/or detected by the microscopic aperture, and the tip is structurally filled with the transparent material. <IMAGE></p> |
申请公布号 |
EP1519388(B1) |
申请公布日期 |
2006.08.16 |
申请号 |
EP20040078523 |
申请日期 |
2000.12.20 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
TAKASHI, NIWA;KATO, KENJI;KASAMA, NOBUYUKI;OUMI, MANABU;MITSUOKA, YASUYUKI;ICHIHARA, SUSUMU |
分类号 |
G01B11/30;G01Q60/18;G01Q60/22;G01Q70/10;G01Q70/14;G01Q70/16 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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