Apparatus for coating a substrate by means of a chemical vapour deposition process,申请号EP19960111651-传众专利搜索

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发明名称	Apparatus for coating a substrate by means of a chemical vapour deposition process
摘要
申请公布号	EP0782173(B1)	申请公布日期	2006.08.16
申请号	EP19960111651	申请日期	1996.07.19
申请人	UNAXIS DEUTSCHLAND HOLDING GMBH	发明人	SZCZYRBOWSKI, JOACHIM, DR.;TESCHNER, GOETZ
分类号	H01J37/34;H05H1/46;C23C14/00;C23C14/35;C23C14/40;C23C14/56;C23C16/44;C23C16/455;C23C16/50;C23C16/505;H01J37/32;H01L21/205;H01L21/31	主分类号	H01J37/34
代理机构		代理人
主权项
地址

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