发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 A semiconductor device comprises a bottom electrode, a top electrode, and a dielectric film provided between the bottom electrode and the top electrode and made of a perovskite type ferroelectrics containing Pb, Zr, Ti and O, the dielectric film comprising a first portion formed of a plurality of crystal grains partitioned by grain boundaries having a plurality of directions.
申请公布号 KR100611707(B1) 申请公布日期 2006.08.11
申请号 KR20047002950 申请日期 2003.05.28
申请人 发明人
分类号 H01L27/105;H01L21/02 主分类号 H01L27/105
代理机构 代理人
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