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发明名称
PROCEDE DE REALISATION D'UNE STRUCTURE MULTI-COUCHES COMPORTANT, EN PROFONDEUR, UNE COUCHE DE SEPARATION
摘要
申请公布号
FR2870988(B1)
申请公布日期
2006.08.11
申请号
FR20040005883
申请日期
2004.06.01
申请人
BRUEL MICHEL
发明人
BRUEL MICHEL
分类号
H01L21/324;H01L21/762
主分类号
H01L21/324
代理机构
代理人
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