COMPOSITION FOR FORMING LOW DIELETRIC FILM COMPRISING FULLERENES, LOW DIELECTRIC FILM USING THE COMPOSITION AND METHOD FOR FORMING THE LOW DIELECTRIC FILM

摘要

A composition for forming a low-dielectric constant film comprising a substituted fullerene, a low-dielectric constant film formed from the composition, and a method for forming the low-dielectric constant film are provided. The low-dielectric constant film has superior mechanical properties, such as hardness and elastic modulus, and excellent thermal conductivity.