| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a three-dimensional structure, which enables a shape of a hollow area to be arbitrarily designed. SOLUTION: This method for manufacturing the three-dimensional hollow structure comprises at least a step of partially forming a porous area in a silicon substrate, a step of forming a silicon layer on the substrate forming the porous area and of partially forming the porous area in the silicon layer, and a step of forming a hollow area by removing the porous area by etching. The method for manufacturing the three-dimensional hollow structure is used for the manufacture of the an ejection head of an inkjet recording apparatus with good positional accuracy, excellent in heat resistance and durability by virtue of the absence of a joint. COPYRIGHT: (C)2006,JPO&NCIPI
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