| 摘要 |
A method for controlling semiconductor manufacturing equipment in a waiting mode, comprising: retrieving information about a waiting time for a product to be provided to the semiconductor manufacturing equipment on a production line, the product being to be subjected to predetermined processing by the semiconductor manufacturing equipment; comparing the waiting time with a period of time required for energy saving control, the period of time required for energy saving control including: lowering electric power and other energy used by the semiconductor manufacturing equipment in the waiting mode to a low-energy level at which the processing is not ready, and then raising the electric power and the other energy to a level at which the processing is ready; and providing the energy saving control during the waiting time if the waiting time is longer than the required period of time.
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