发明名称 |
GENERATION METHOD OF LIGHT INTENSITY DISTRIBUTION, GENERATION APPARATUS OF LIGHT INTENSITY DISTRIBUTION, AND LIGHT MODULATION ELEMENT ASSEMBLY |
摘要 |
A generation method of a light intensity distribution uses a first light modulation element and a second light modulation element which are arranged to be apart from each other by a distance D and face each other in parallel to optically modulate a light beam which enters the light modulation elements, thereby generating a light intensity distribution on a target surface. The first light modulation element has a pattern formed by repeating a basic unit having a pitch P. The distance D is set to a distance with which the light intensity distribution generated on the predetermined surface is not changed even if a relative position of the first light modulation element and the second light modulation element is shifted in a plane direction.
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申请公布号 |
US2006177973(A1) |
申请公布日期 |
2006.08.10 |
申请号 |
US20060275961 |
申请日期 |
2006.02.07 |
申请人 |
TANIGUCHI YUKIO;OGAWA HIROYUKI;JYUMONJI MASAYUKI;AKITA NORITAKA;MATSUMURA MASAKIYO |
发明人 |
TANIGUCHI YUKIO;OGAWA HIROYUKI;JYUMONJI MASAYUKI;AKITA NORITAKA;MATSUMURA MASAKIYO |
分类号 |
H01L21/84;H01L21/00 |
主分类号 |
H01L21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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