| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of sterilization that achieves a satisfactory sterilization effect and is free from any residual gases, thus being harmless, and an apparatus therefor. <P>SOLUTION: This method comprises: a depressurization step of reducing the pressure within a chamber for accommodating a sterilization subject; a hydrogen peroxide supply step of feeding hydrogen peroxide into the chamber; an ozone supply step of feeding ozone into the chamber; a sterilization step of diffusing hydrogen peroxide and ozone fed in the chamber to thereby effect sterilization of the sterilization subject; a gas discharge step of removing gases from the chamber; and a plasma generation step of generating plasma in the chamber so as to decompose any hydrogen peroxide and ozone remaining in the vicinity of the sterilization subject into radicals, these radicals promoting the sterilization. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
