| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron emitting element of which the electron emitting part can be formed in a simple way and can miniaturize it and make it high definition, its manufacturing method, an electro-optical device, and electronic equipment. <P>SOLUTION: A first electrode 4 is formed on a wiring 17, a thin film 51 that is a monomolecular film of an organic matter (film of hydrocarbon molecule having thiol group) around the first electrode 14, a second electrode 5 is formed on a wiring 18 so as to overlap on a part of the first electrode 4, and an electron emitting part 13 having a nano gap between the first and second electrodes 4, 5 by removing the film 51 by performing UVO<SB>3</SB>cleaning. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
