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发明名称
Method for a top gate self-aligned polysilicon thin film transistor (TFT)
摘要
申请公布号
EP1102313(B1)
申请公布日期
2006.08.09
申请号
EP20000310235
申请日期
2000.11.17
申请人
XEROX CORPORATION
发明人
HO, JACKSON;FULKS, RONALD T.
分类号
H01L21/336;H01L29/786
主分类号
H01L21/336
代理机构
代理人
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