Precursors for chemical vapour deposition comprising metal & ligand with co-ordinating N & O, separated by 2 or 3 carbons, & sterically hindering substituent,申请号GB20050002446-传众专利搜索

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发明名称	Precursors for chemical vapour deposition comprising metal & ligand with co-ordinating N & O, separated by 2 or 3 carbons, & sterically hindering substituent
摘要
申请公布号	GB2422832(A)	申请公布日期	2006.08.09
申请号	GB20050002446	申请日期	2005.02.07
申请人	EPICHEM LIMITED	发明人	ANTHONY COPELAND JONES
分类号	C07D263/14;C07C31/28;C07C215/50;C07F7/00;C23C16/40	主分类号	C07D263/14
代理机构		代理人
主权项
地址

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