摘要 |
<P>PROBLEM TO BE SOLVED: To provide a metal oxide film capable of realizing the low interface resistance between fine particles and the high surface area by providing micropores in the metal oxide film with network-shaped grooves formed in the surface, and its manufacturing method having excellent productivity. <P>SOLUTION: Network-shaped grooves are formed in a surface of a metal oxide film, and the peak of the pore diameter is in a range between 10 Å and 100 Å. There are provided the metal oxide film with the optimum peak of the pore diameter, a solar cell using the oxide film, a photocatalyst thin film and a manufacturing method of the metal oxide film. <P>COPYRIGHT: (C)2006,JPO&NCIPI |