METHOD FOR EVALUATING CONCENTRATION OF SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To know the effective concentration of a p-layer and an n-lyer of a striped parallel pn layer provided in a vertical super junction semiconductor element. SOLUTION: An evaluation element 5 is produced by thinning the width of an element in the direction parallel to the stripes to the same extent as the thickness of a vertical super junction semiconductor element. With the side in the thickness direction of the evaluation element 5 down, the evaluation element 5 is obliquely polished so as to enlarge the width of the parallel pn layer 2 of the evaluation element 5. The spread resistance measuring device is used to a polishing face 4 exposed by oblique polishing to perform concentration evaluation. COPYRIGHT: (C)2006,JPO&NCIPI