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发明名称
Method for etching of the shallow trench isolation
摘要
申请公布号
KR100609228(B1)
申请公布日期
2006.08.02
申请号
KR20040115789
申请日期
2004.12.29
申请人
发明人
分类号
H01L21/76;H01L21/3065
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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